verticale

Multi Sensor Platformfor Smart Building Management project: research at the University of Brescia

(in lingua inglese)

- Air quality monitoring indoors
- Smart building management & smart homes
- Air quality monitoring outdoors
- Pollution monitoring and mapping (Apps!)
- Industrial process monitoring (Industry 4.0)
- Smart multi-sensor networks
- Consumer electronics

Scarica il PDF Scarica il PDF
Aggiungi ai preferiti Aggiungi ai preferiti


Atti di convegni o presentazioni contenenti case history
SAVE ottobre 2016 Smart Building o Building 4.0?

Pubblicato
da Alessia De Giosa
SAVE 2016Segui aziendaSegui




Settori: 

Parole chiave: 


Estratto del testo
Veronafiere 19-20 ottobre 2016 Gli atti dei convegni e più di 7.000 contenuti su www.verticale.net Cogenerazione Termotecnica Industriale Pompe di Calore 27 ottobre Cogenerazione Termotecnica Industriale Pompe di Calore Alimentare Alimentare Petrolchimico Alimentare 28 ottobre Alimentare Petrolchimico Alimentare Alimentare Petrolchimico Visione e Tracciabilità 28 ottobre Luce Energia Domotica LED Luce Energia Domotica LED Project No: 611887 Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere 1 Multi-Sensing Platform for Smart Building Management project: research at the University of Brescia Elisabetta Comini, A. Bertuna, N. Kaur, N. Poli, D. Zappa, G. Sberveglieri A. Köck Project No: 611887 Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere 2 Outline
1. Overview MSP-Project
2. Why CMOS- & 3D-Integration'
3. Achievements & Highlights
4. Research at UNIBS
5. Summary
6. Outlook: Nasys Project No: 611887 Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere 3 § Development of smart 3D-integrated multi-sensor systems enabling indoor and outdoor environmental
monitoring! 1. OVERVIEW MSP-PROJECT Project No: 611887 Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere 4 § Development of process & manufacturing chains enabling flexible ''plug-and-play'' 3D integration of sensors and
devices on CMOS platform chips § The concept is based on rigorous employment of Through-Silicon-Via (TSV) technology § The fabrication approach is based on the multi-project- wafer (MPW) service § This shall be the enabler for take-up of Key Emerging Technologies (KETs) in particular by SMEs § Development of wireless communication for networks and handheld devices Project No: 611887 Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere 5 § Development of novel sensordevices based on nanotechnology as ''tool-box'' for 3D-system integration Project No: 611887 Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere 6 § Gas sensors and humidity sensor based on SnO2, CuO, ZnO, WO3,' - Nanowires, Graphene & CNT § Functionalization with (bi)metallic Nanoparticles § AlGaN/GaN-based gas sensor for NO2 § Thin film bulk resonator (FBAR) particle sensor § Visible light & thermopile-based infrared sensors § SiC-based UV-A/B sensor § Photovoltaic energy harvester with interdigitated back
contact (IBC) structure § Piezoelectric energy harvester based on ZnO-NWs and
PVDF-films Project No: 611887 Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere 7 Indoors CO, CO2, VOCs, PM Outdoors NO2, O3, CO, PM10, PM2.5, UFPs Target Parameters Project No: 611887 Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere 8 § Air Quality Monitoring for Smart Building Management: Project No: 611887 Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere 9 § 17 partners from 6 countries § 18.5 M' budget and ~ 1300 PMs effort Project No: 611887 Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere 10 MSP Device for Smart
Building Management
MSP Device for Wearable Wristwatch Application MSP Device for Outdoor Environmental Monitoring Fig.2a: MSP for Smart Building Management. Fig.2b: MSP for Wearable Wristwatch. Fig.2c: MSP for Outdoor Environmental Monitoring. § Realization of three specific 3D-integrated MSP demonstrator systems Project No: 611887 Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere 11 2. WHY CMOS- & 3D-INTEGRATION' § Air quality monitoring indoors § Smart building management & smart homes § Air quality monitoring outdoors § Pollution monitoring and mapping (Apps!) § Industrial process monitoring (Industry 4.0) § Smart multi-sensor networks § Consumer electronics § Etc' Many new and emerging applications ! Project No: 611887 Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere 12 § New life style applications in wearables, smart phones, smart watches or smart rings Project No: 611887 Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere 13 § Forecast: Growth of environmental sensors is expected to increase from ~ 60 Mio. units in 2016 to
more than ~ 350 Mio. units in 2020 Source: IHS
Emerging
Sensors in
Handsets and
Tablet reports,
2014 Project No: 611887 Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere 14 § Forecast: Wearables will grow at an annual rate of 35% over the next five years Project No: 611887 Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere 15 § Forecast: The smartwatch will be the leading product category annual rate of 41% over the next five years Project No: 611887 Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere 16 § New life style applications in wearables, smart phones, smart watches or smart rings CMOS- & 3D-Integration is key for
consumer electronic applications ! § Smal footprint
§ Low power consumption
§ Smart system integration
§ Multi-sensing capability
§ Multi-functionality Project No: 611887 Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere 17 We have elaborated the ''big picture'' No.2! 4. ACHIEVEMENTS & HIGHLIGHTS § Sensor devices to be 3D-stacked on the platform chip 2 are fixed § Full size 2 x 2 cm2 is employed for demonstrator Project No: 611887 Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere 18 4. ACHIEVEMENTS & HIGHLIGHTS Sensor types Kind of 3D stacking Label 3 gas sensor µhp array chips (MCL/AMS) TSV, Overmolded A 4 gas sensor µhp chips (APPS) Wirebonded B 1 gas sensor µhp (IMEC) Wirebonded, overmolded C 1 UV-A/B sensor (FHG-IISB) Wirebonded, overmolded D 1 IR sensor array chip (CCS ) TSV, Overmolded E 1 temperature sensor (AMS ) Flip Chip, Overmolded F 1 V-light (AMS ) TSV, Overmolded G § 12 different sensor chips comprising a maximum of 53 (!) gas sensors will be integrated to the multi-sensor module Project No: 611887 Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere Research at UNIBS 19 Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere MOX Chemical Sensors ' Metal-oxides represent a category of materials with diversified properties covering al aspects of material science and physics in areas including superconductivity and magnetism ' Metal oxides are already wel established in the field of gas sensing ' Most common sensing mechanism: electrical resistance variation upon gas chemisorption ' Chemiresistors simple architecture and easy signal processing ' Measured gases are complex odor consisting in a mix of different analytes ' Gas sensors arrays or electronic olfaction systems 20 Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere MOX chemical sensors ' Technological chal enge: ' fabrication of materials with smal crystal ize size which maintained their stability over long term operation at high temperature ' A huge variety of devices have been developed mainly by an empirical approach and a lot of basic theoretical research and spectroscopy studies have been carried out to improve the wel known ''3S' of a gas sensor ' Sensitivity, Selectivity and Stability Cost Sensitivity Selectivity Stability Power Consumption However, from a commercial point- of-view low costs and reduced
power consumption are fundamental features. 21 Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere Not-conventional Substrates ' Flexible: Plastics, even Paper (!) ' Advantages: ' Low cost & Power ' Flexible, easy to manage ' Innovative fabrication processes ' Disadvantages: ' Low temperature (<350°C') ' Microfabrication: MEMS Membranes ' Advantages: ' Very Low Power ' Medium Temperature (<550°C) ' Silicon technology ' Disadvantages: ' Fragile and difficult to process ' High cost (manufacturing, processing,') Cambridge CMOS Sensors www.ccmos.com 22 Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere MEMS substrates (AMS) ' AMS Germany microhotplates, already used in commercial devices (thin & thick films). ' Low Power: 60mW for 400°C, 1/10th of our standard 2x2 mm alumina substrate! 23 Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere NWs integrated on uHPs 24 ' Hotplates compatible with metal oxides! SnO2 CuO ZnO WO3 Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere ' Firstly we investigated the performance of CuO, SnO2 and WO3 NWs deposited on AMS (Germany) uHP towards fixed concentration of chemical compounds ' @200°C for NO2 ' @400°C for O3, Ethanol and Acetone RH=50%@20°C Response Screening 25 Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere Calibration Curves 26 Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere ' Weeks of operation without breakdowns.
' CuO response towards NO2 is negligible. ' Interesting WO3 performance for ppb-level NO2 detection, with a power consumption of only 25mW (200°C). ' Good ozone response of SnO2 and WO3. CuO is also sensitive. ' Poor selectivity between VOCs (Acetone and Ethanol). SnO2 is the most sensitive material. ' Ideal candidates: ' SnO2 for VOCs ' WO3 for NO2
' CuO for O3 Considerations 27 Project No: 611887 Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere 28 5. SUMMARY & OUTLOOK § All devices being stacked on to final demonstrator are fixed now § Impressive progress in the development of sensor devices
§ The CMOS platform chip 2 is in production
§ Successful elaboration of process flow to overmolded devices including all post-processing steps § A wireless system has been developed designed to achieve best-in-class performance at world''s lowest power
consumption! Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere Spin - off from University of Brescia Nano Sensor Systems s.r.l. Via Valotti, 9
Department of Information Engineering University of Brescia Brescia '' Italy President: Prof. Giorgio Sberveglieri
Vice President Prof. Elisabetta Comini Web site: starting next November Other members: Dr. PhD Veronica Sberveglieri Dr. PhD Matteo Falasconi
Eng. PhD Alessandro Dionisi Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere NASYS Mission ' Electronic Noses ' Food: direct screening of food spoilage ' Security: detection of explosive or toxic gases. Detection of hidden people. ' Environments : detection of gases in the ambient Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere SMALL SESNSOR SYSTEM S3' Tabella 1 Sensor Operating Temperature (°C) Composition Description 1 245 SnO2 - MoO2 RGTO sensor made of a blend of Tin and Molybdenum oxides. 2 280 ZnO Nanowire sensor made of Zinc oxide 3 375 SnO2 Nanowire sensor made of Tin oxide 4 400 SnO2 // Ag RGTO sensor made of Tin oxide catalyzed with silver 5 500 ZnO Nanowire sensor made of Zinc oxide 6 500 SnO2 - WO3 RGTO sensor made of a blend of Tin and Tungsten oxides. Smal Sensor System Device S3''s Sensor Chamber Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere Why multiresponse (mrs) sensor' ' The independent transducers recognize better the different gas response. ' This mrs, a new class of device, are able to quantify individual marker components of gas mixture and to give a more reliable finger print. ' In principle they could give a more stable response, rejecting the unexpected interference gases, over the sensor array. Elisabetta Comini 20 Ottobre 2016, SAVE '' Veronafiere Non-selective
conventional sensors Selective sensors
via multivariable principles Extreme conditions:
Humidity, temperature
Chemical background Conventional
EN- sensor array Improved stability
Reducing costs and size Patterns detection
(e.g. breath, odors) Reliability Cost (euro) 1 - 10 0.001 '' 0.1 Power (mW) 1 - 1000 0.000001 '' 0.1 Consumer Electronics with integrated sensors Wearable , Portable Sensor array Production of sensors on large scale Gas Application-Specific Integrated Circuits (electronic/photonic) 2015 2020 2025 Expected Evolution of Chemical Sensors


© Eiom - All rights Reserved     P.IVA 00850640186